Год издания: 2008
Количество страниц: 112
В продаже с 18.01.2012
Как только книга Aligned Ion Implantation Using Scanning Probes: Towards Precise Single Ion Placement for a SolidState Quantum Computer станет доступна для заказа в одном из интернет-магазинов, Вам на e-mail будет отправлено уведомление.Укажите e-mail для связи:
A new technique for precise ion implantation has beendeveloped using a scanning probe that has beenequipped with a small aperture and incorporated intoan ion beamline. Ions are passed through the apertureand implanted into a sample. By using a scanningprobe the target can be imaged in a non-destructiveway prior to implantation. The probe can be placed atthe desired location with nanometer precision.With this approach a final placement accuracy ofabout 10 nm is envisioned, limited by straggling andthe aperture size. In this work a feature size downto 120 nm has been demonstrated.This research is part of a program for thedevelopment of test structures for a quantumcomputer. For this application the placement accuracyneeds to be increased and a detector for single iondetection has to be integrated into the setup. Boththese issues are discussed.To achieve single ion detection highly charged ionsare used, since the additional potential energyreleased by these ions on impact should lead to...